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  Location:Home > Products > Industial Innovative Drying Facilities > Class 100N2 Cleaning Vacuum Oven
                                        “MEMS Polymide Curing Oven ”

 


       •Temperature up to 250/350/450 Degree
       •Oxygen Concentration Controlled & Monitored <  100 PPM
       •SUS304 for Body and Interior Material
       •99.99% HEPA Filter Installed
       •7“Touch Panel Controller -Manual and Programmable Model
       •150/250/500 L internal Volume Available                

 Applications:

  • MEMS Backing Process
  • SEMI Wafer Manufacturing Process